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. 2023 Apr 23;14(5):906.
doi: 10.3390/mi14050906.

Mono- and Bilayer Graphene/Silicon Photodetectors Based on Optical Microcavities Formed by Metallic and Double Silicon-on-Insulator Reflectors: A Theoretical Investigation

Teresa Crisci  1   2 , Luigi Moretti  1 , Mariano Gioffrè  2 , Maurizio Casalino  2
Affiliations

Mono- and Bilayer Graphene/Silicon Photodetectors Based on Optical Microcavities Formed by Metallic and Double Silicon-on-Insulator Reflectors: A Theoretical Investigation

Teresa Crisci et al. Micromachines (Basel). .

Abstract

In this work, we theoretically investigate a graphene/silicon Schottky photodetector operating at 1550 nm whose performance is enhanced by interference phenomena occurring inside an innovative Fabry-Pèrot optical microcavity. The structure consists of a hydrogenated amorphous silicon/graphene/crystalline silicon three-layer realized on the top of a double silicon-on-insulator substrate working as a high-reflectivity input mirror. The detection mechanism is based on the internal photoemission effect, and the light-matter interaction is maximized through the concept of confined mode, exploited by embedding the absorbing layer within the photonic structure. The novelty lies in the use of a thick layer of gold as an output reflector. The combination of the amorphous silicon and the metallic mirror is conceived to strongly simplify the manufacturing process by using standard microelectronic technology. Configurations based on both monolayer and bilayer graphene are investigated to optimize the structure in terms of responsivity, bandwidth, and noise-equivalent power. The theoretical results are discussed and compared with the state-of-the-art of similar devices.

Keywords: graphene; near-infrared; photodetectors; resonant cavity; silicon.

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Conflict of interest statement

The authors declare no conflict of interest.

Figures

Figure 1
Figure 1
Sketch of the Metal/a-Si:H/Gr/Si/DSOI PD.
Figure 2
Figure 2
Dispersion curves of all materials used in our simulations: (a) real part of refractive index, (b) extinction coefficient.
Figure 3
Figure 3
(a) Optical absorption of mono- and bilayer suspended graphene calculated by Equation (4) and (b) reflectivity vs wavelength of both the input mirror (DSOI) and the output mirror (200 nm-thick Au metal).
Figure 4
Figure 4
Optical absorption as a function of both c-Si and a-Si:H thicknesses of (a) mGr, (b) 200 nm-thick Au, (c) spectral optical absorption of mGr and Au and total absorption in the optimized cavity, and (d) spectral responsivity of the optimized mGr/Si Schottky PD.
Figure 5
Figure 5
(a) Constant times characterizing the proposed PD and 3 dB roll-off frequency as a function of the mGr disk radius, and (b) spectral NEP.
Figure 6
Figure 6
Optical absorption as a function of both c-Si and a-Si:H thicknesses of (a) bGr, (b) 200 nm-thick Au, (c) spectral optical absorption of bGr and Au and total absorption in the optimized cavity, and (d) spectral responsivity of the optimized bGr/Si Schottky PD.
Figure 7
Figure 7
(a) Constant times characterizing the proposed PD and 3 dB roll-off frequency as a function of the bGr disk radius, and (b) spectral NEP.
See this image and copyright information in PMC

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