This site needs JavaScript to work properly. Please enable it to take advantage of the complete set of features!

Skip to main page content

Add to Collections

Your saved search

Name of saved search:

Search terms:

Test search terms

Would you like email updates of new search results?

Yes
No

Email: (change)

Frequency:

Which day?

Which day?

Report format:

Send at most:

Send even when there aren't any new results

Optional text in email:

Your RSS Feed

Published Erratum

. 2024 Jan 24:10:17.

doi: 10.1038/s41378-023-00649-2. eCollection 2024.

Correction: Integrated silicon photonic MEMS

Niels Quack^{1

2}, Alain Yuji Takabayashi¹, Hamed Sattari^{1

3}, Pierre Edinger⁴, Gaehun Jo⁴, Simon J Bleiker⁴, Carlos Errando-Herranz⁴, Kristinn B Gylfason⁴, Frank Niklaus⁴, Umar Khan⁵, Peter Verheyen⁶, Arun Kumar Mallik⁷, Jun Su Lee⁷, Moises Jezzini⁷, Iman Zand⁵, Padraic Morrissey⁷, Cleitus Antony⁷, Peter O'Brien⁷, Wim Bogaerts⁵

Affiliations

Affiliations

¹ École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.
² School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Camperdown, NSW 2006 Australia.
³ Swiss Center for Electronics and Microtechnology (CSEM), 2002 Neuchâtel, Switzerland.
⁴ Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden.
⁵ Department of Information Technology, Photonics Research Group, Ghent University - IMEC, Technologiepark-Zwijnaarde 126, 9052 Gent, Belgium.
⁶ imec vzw. 3DSIP Department, Si Photonics Group, Kapeldreef 75, 3001 Leuven, Belgium.
⁷ Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland.

PMID: 38268775
PMCID: PMC10806061
DOI: 10.1038/s41378-023-00649-2

Published Erratum

Correction: Integrated silicon photonic MEMS

Niels Quack et al. Microsyst Nanoeng. 2024.

. 2024 Jan 24:10:17.

doi: 10.1038/s41378-023-00649-2. eCollection 2024.

Authors

Niels Quack^{1

2}, Alain Yuji Takabayashi¹, Hamed Sattari^{1

3}, Pierre Edinger⁴, Gaehun Jo⁴, Simon J Bleiker⁴, Carlos Errando-Herranz⁴, Kristinn B Gylfason⁴, Frank Niklaus⁴, Umar Khan⁵, Peter Verheyen⁶, Arun Kumar Mallik⁷, Jun Su Lee⁷, Moises Jezzini⁷, Iman Zand⁵, Padraic Morrissey⁷, Cleitus Antony⁷, Peter O'Brien⁷, Wim Bogaerts⁵

Affiliations

¹ École Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Switzerland.
² School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Camperdown, NSW 2006 Australia.
³ Swiss Center for Electronics and Microtechnology (CSEM), 2002 Neuchâtel, Switzerland.
⁴ Division of Micro and Nanosystems, KTH Royal Institute of Technology, 114 28 Stockholm, Sweden.
⁵ Department of Information Technology, Photonics Research Group, Ghent University - IMEC, Technologiepark-Zwijnaarde 126, 9052 Gent, Belgium.
⁶ imec vzw. 3DSIP Department, Si Photonics Group, Kapeldreef 75, 3001 Leuven, Belgium.
⁷ Tyndall National Institute, Lee Maltings Complex Dyke Parade, Cork, T12 R5CP Ireland.

PMID: 38268775
PMCID: PMC10806061
DOI: 10.1038/s41378-023-00649-2

Abstract

[This corrects the article DOI: 10.1038/s41378-023-00498-z.].

Keywords: NEMS; Nanoscale devices; Other photonics.

© The Author(s) 2024.

PubMed Disclaimer

Erratum for

Integrated silicon photonic MEMS.
Quack N, Takabayashi AY, Sattari H, Edinger P, Jo G, Bleiker SJ, Errando-Herranz C, Gylfason KB, Niklaus F, Khan U, Verheyen P, Mallik AK, Lee JS, Jezzini M, Morrissey P, Antony C, O'Brien P, Bogaerts W. Quack N, et al. Microsyst Nanoeng. 2023 Mar 20;9:27. doi: 10.1038/s41378-023-00498-z. eCollection 2023. Microsyst Nanoeng. 2023. PMID: 36949734 Free PMC article.

References

1. Quack, N. et al. Integrated silicon photonic MEMS. Microsyst. Nanoeng.9, 27 10.1038/s41378-023-00498-z (2023). - PMC - PubMed

Publication types

Actions

LinkOut - more resources

Full Text Sources