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. 2024 Jan 20;24(2):663.
doi: 10.3390/s24020663.

Development of a Large-Range XY-Compliant Micropositioning Stage with Laser-Based Sensing and Active Disturbance Rejection Control

Ashenafi Abrham Kassa  1 , Bijan Shirinzadeh  1 , Kim Sang Tran  1 , Kai Zhong Lai  1 , Yanling Tian  2 , Yanding Qin  3 , Huaxian Wei  4
Affiliations

Development of a Large-Range XY-Compliant Micropositioning Stage with Laser-Based Sensing and Active Disturbance Rejection Control

Ashenafi Abrham Kassa et al. Sensors (Basel). .

Abstract

This paper presents a novel design and control strategies for a parallel two degrees-of-freedom (DOF) flexure-based micropositioning stage for large-range manipulation applications. The motion-guiding beam utilizes a compound hybrid compliant prismatic joint (CHCPJ) composed of corrugated and leaf flexures, ensuring increased compliance in primary directions and optimal stress distribution with minimal longitudinal length. Additionally, a four-beam parallelogram compliant prismatic joint (4BPCPJ) is used to improve the motion decoupling performance by increasing the off-axis to primary stiffness ratio. The mechanism's output compliance and dynamic characteristics are analyzed using the compliance matrix method and Lagrange approach, respectively. The accuracy of the analysis is verified through finite element analysis (FEA) simulation. In order to examine the mechanism performance, a laser interferometer-based experimental setup is established. In addition, a linear active disturbance rejection control (LADRC) is developed to enhance the motion quality. Experimental results illustrate that the mechanism has the capability to provide a range of 2.5 mm and a resolution of 0.4 μm in both the X and Y axes. Furthermore, the developed stage has improved trajectory tracking and disturbance rejection capabilities.

Keywords: active disturbance rejection control; compliant mechanism; laser interferometer-based measurement; micropositioning stage.

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Conflict of interest statement

The authors declare no conflict of interest.

Figures

Figure 2
Figure 2
Mechanism schematic and design dimensions. Parameter dimensions are provided in Table 2.
Figure 3
Figure 3
Hybrid flexure element with coordinate orientation in the local coordinate frame.
Figure 1
Figure 1
(a) Mechanism design; (b) 4PP kinematic configuration.
Figure 4
Figure 4
Maximum deformation analysis.
Figure 5
Figure 5
von Mises stress analysis of the positioning stage.
Figure 6
Figure 6
The first six mode shapes; (a,b,f) are in-plane modes; (c–e) are out-of-plane modes.
Figure 7
Figure 7
Experimental hardware setup and architecture.
Figure 8
Figure 8
Experimental setup.
Figure 9
Figure 9
Open loop frequency response.
Figure 10
Figure 10
Active disturbance rejection control framework.
Figure 11
Figure 11
(a) Step response; (b) tracking error.
Figure 12
Figure 12
Periodic trajectory tracking: (a) sinusoidal trajectory; (b) tracking error of sinusoidal signal (c) triangular trajectory; (d) tracking error of triangular signal; (e) square trajectory tracking; (f) tracking error of square signal.
Figure 13
Figure 13
(a) Superimposed trajectory tracking; (b) tracking error.
Figure 14
Figure 14
Closed loop resolution tracking.
Figure 15
Figure 15
(a) Load mass on the end-effector; (b) sinusoidal tracking error with and without mass.
See this image and copyright information in PMC

References

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