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. 2024 Jan 27;15(2):194.
doi: 10.3390/mi15020194.

Fabrication of Micro Carbon Mold for Glass-Based Micro Hole Array

Ui Seok Lee  1 , Dae Bo Sim  1 , Ji Hyo Lee  1 , Bo Hyun Kim  2
Affiliations

Fabrication of Micro Carbon Mold for Glass-Based Micro Hole Array

Ui Seok Lee et al. Micromachines (Basel). .

Abstract

In glass molding to produce biochips with micro holes, cavities, and channels, it is important to machine micro molds. This study presents a novel process for fabricating micro pin arrays on carbon graphite, one of the glass molding materials. The micro pin array was used as a mold to fabricate a glass-based micro hole array. Using conventional micro endmill tools, machining micro-cylindrical pins requires complex toolpaths and is time-consuming. In order to machine micro pin arrays with high efficiency, a micro eccentric tool was introduced. Micro pin arrays with a diameter of 200 µm and a height of 200 µm were easily fabricated on graphite using the micro eccentric tool. In the machining of micro pin arrays using eccentric tools, the machining characteristics such as cutting force and tool wear were investigated.

Keywords: eccentric tool; glass molding; glass-based biochip; micro hole array; micro mold.

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Conflict of interest statement

The authors declare no conflict of interest.

Figures

Figure 1
Figure 1
Fabrication process of glass-based micro hole array using eccentric tools.
Figure 2
Figure 2
Experimental setup (both micro tool fabrication and micro pin array machining were performed on the same system).
Figure 3
Figure 3
(a–c) schematic diagram of eccentric tool fabrication process and (d) SEM image of micro eccentric tool.
Figure 3
Figure 3
(a–c) schematic diagram of eccentric tool fabrication process and (d) SEM image of micro eccentric tool.
Figure 4
Figure 4
Comparison between the toolpath of (a) a commercial milling tool and (b) a micro eccentric tool.
Figure 5
Figure 5
(a) Average thrust force according to different feed rates; (b) thrust force measured in a single pin machining (4500 rpm; depth: 200 µm).
Figure 6
Figure 6
(a) Average thrust force according to different tool rotational speeds; (b) thrust force measured in a single pin machining (10 µm/s: depth: 200 µm).
Figure 7
Figure 7
Microscope images and surface profiles of tool bottom surfaces machined with capacitances of (a) 50, (b) 300, and (c) 500 nF.
Figure 8
Figure 8
Average thrust force and tool roughness (Rt) according to different capacitances (10 µm/s; depth: 200 µm; 4500 rpm).
Figure 9
Figure 9
The thrust force according to number of pins (10 µm/s; depth: 200 µm; 4500 rpm).
Figure 10
Figure 10
Surface roughness of tool bottom according to the number of machined pins.
Figure 11
Figure 11
Bottom surface of micro eccentric tool (a) before machining and (b) after machining 900 pins.
Figure 12
Figure 12
Schematic diagram of EDM dressing process.
Figure 13
Figure 13
Average thrust force with dressing according to the number of machined pins; 200 µm depths, 4500 rpm, 10 µm/s feedrate.
Figure 14
Figure 14
Micro pin array on graphite carbon machined by eccentric tool.
Figure 15
Figure 15
Micro hole array on glass plate by glass molding (hole diameter: 200 µm).
See this image and copyright information in PMC

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