Correction: Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones

Affiliations

¹ Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands.
² Infineon Technologies AG, Am Campeon 1-15, Neubiberg, 85579 Germany.
³ Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands.
⁴ Department of Precision and Microsystems Engineering (PME), Delft University of Technology, Delft, The Netherlands.

Published Erratum

Roberto Pezone et al. Microsyst Nanoeng. 2024.

. 2024 Jun 4:10:73.

doi: 10.1038/s41378-024-00705-5. eCollection 2024.

¹ Laboratory of Electronic Components, Technology and Materials (ECTM), Department of Microelectronics, Delft University of Technology, Delft, The Netherlands.
² Infineon Technologies AG, Am Campeon 1-15, Neubiberg, 85579 Germany.
³ Kavli Institue of Nanoscience, Department of Quantum Nanoscience, Delft University of Technology, Delft, the Netherlands.
⁴ Department of Precision and Microsystems Engineering (PME), Delft University of Technology, Delft, The Netherlands.

Abstract

[This corrects the article DOI: 10.1038/s41378-024-00656-x.].

Keywords: Electrical and electronic engineering; Engineering.

Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones.
Pezone R, Anzinger S, Baglioni G, Wasisto HS, Sarro PM, Steeneken PG, Vollebregt S. Pezone R, et al. Microsyst Nanoeng. 2024 Feb 21;10:27. doi: 10.1038/s41378-024-00656-x. eCollection 2024. Microsyst Nanoeng. 2024. PMID: 38384678 Free PMC article.

1. Pezone R, et al. Highly-sensitive wafer-scale transfer-free graphene MEMS condenser microphones. Microsyst. Nanoeng. 2024;10:27. doi: 10.1038/s41378-024-00656-x. - DOI - PMC - PubMed