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. 2024 Oct 27;15(11):1304.
doi: 10.3390/mi15111304.

Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser

Junyu Duan  1 , Gui Long  1 , Xu Xu  2   3 , Weiming Liu  4 , Chuankun Li  4 , Liang Chen  5   6 , Jianguo Zhang  1 , Junfeng Xiao  1
Affiliations

Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser

Junyu Duan et al. Micromachines (Basel). .

Abstract

In this paper, hierarchical micro/nano structures composed of periodic microstructures, laser-induced periodic surface structures (LIPSS), and nanoparticles were fabricated by femtosecond laser processing (LP). A layer of hydrophobic species was formed on the micro/nano structures through perfluorosilane modification (PM). The reflectivity and hydrophobicity's influence mechanisms of structural height, duty cycle, and size are experimentally elucidated. The average reflectivity of the silicon surface in the visible light band is reduced to 3.0% under the optimal parameters, and the surface exhibits a large contact angle of 172.3 ± 0.8° and a low sliding angle of 4.2 ± 1.4°. Finally, the durability of the anti-reflection and superhydrophobicity is also confirmed. This study deepens our understanding of the principles of anti-reflection and superhydrophobicity and expands the design and preparation methods for self-cleaning and anti-reflective surfaces.

Keywords: anti-reflection; durability; femtosecond laser; micro/nano structures; superhydrophobicity.

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Conflict of interest statement

Author Xu Xu was employed by the company Hubei Jiuzhiyang Infrared System Co., Ltd. The remaining authors declare that the research was conducted in the absence of any commercial or financial relationships that could be construed as a potential conflict of interest.

Figures

Figure 1
Figure 1
(a) Detailed explanation of microstructure parameters, (b) the anti-reflective effect of samples (The pattern is the emblem of Huazhong University of Science and Technology), and (c) the self-cleaning effect of samples before and after the droplet drop.
Figure 2
Figure 2
SEM images of micro/nanostructured surfaces. (a–c) Micro/nanostructures with different structural heights (H), duty cycles (D), and sizes (S). (d–f) Microstructures; (g–i) LIPSS; (j–l) nanoparticles.
Figure 3
Figure 3
EDS results of micro/nanostructured surfaces. (a–c) Elemental content of the polished surface, after LP and after PM; (d) element distribution.
Figure 4
Figure 4
The XPS survey spectra of micro/nanostructured surfaces after LP and after PM. (a) XPS full spectrum. (b,c) High-resolution XPS spectra for C 1s and F 1s.
Figure 5
Figure 5
Schematic of the anti-reflective principle of light waves propagating through different characteristic structural surfaces. (a) Flat surface, (b) microstructures, and (c) micro/nanostructures.
Figure 6
Figure 6
Reflectance spectra of micro/nanostructured surfaces at 200–2500 nm. (a) Different heights, (b) different duty cycles, and (c) different sizes. (d) After LP and after PM.
Figure 7
Figure 7
(a) The wettability of prepared surfaces before and after perfluorosilane modification. (b) Schematic diagram of wettability transition.
Figure 8
Figure 8
(a) The contact angle testing process of a 4 μL droplet. (b–d) The contact angle of micro/nanostructured surfaces with different heights, duty cycles, and sizes.
Figure 9
Figure 9
(a) Reflectance spectra of samples at 200–2500 nm after various tests. (b) The contact angle of samples after various tests. (c–e) Surface morphology and elemental content after scratch test, after tape test, and after 30 days.
See this image and copyright information in PMC

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