Nanofabrication for Nanophotonics

Younghwan Yang¹, Youngsun Jeon¹, Zhaogang Dong^{2

3

4}, Joel K W Yang⁴, Mahsa Haddadi Moghaddam⁵, Dai-Sik Kim⁵, Dong Kyo Oh¹, Jihae Lee⁶, Mario Hentschel⁷, Harald Giessen⁷, Dohyun Kang¹, Gyeongtae Kim¹, Takuo Tanaka^{8

9}, Yang Zhao¹⁰, Johannes Bürger¹¹, Stefan A Maier^{12

13}, Haoran Ren¹², Wooik Jung¹⁴, Mansoo Choi^{15

16}, Gwangmin Bae¹⁷, Haomin Chen¹⁷, Seokwoo Jeon¹⁷, Jaekyung Kim¹, Eunji Lee⁶, Hyunjung Kang¹, Yujin Park¹, Dang Du Nguyen^{18

19}, Inki Kim^{18

19}, Pablo Cencillo-Abad²⁰, Debashis Chanda^{20

21

22}, Xinxin Jing^{23

24}, Na Liu^{23

24}, Irina V Martynenko^{25

26}, Tim Liedl²⁵, Yuna Kwak²⁷, Jwa-Min Nam²⁷, Sang-Min Park²⁸, Teri W Odom²⁸, Hye-Eun Lee²⁹, Ryeong Myeong Kim²⁹, Ki Tae Nam²⁹, Hyunah Kwon^{30

31}, Hyeon-Ho Jeong³², Peer Fischer^{30

31

33

34}, Jiwon Yoon³⁵, Shin-Hyun Kim³⁶, Sangmin Shim³⁶, Dasol Lee³⁶, Luis A Pérez³⁷, Xiaoyu Qi³⁷, Agustin Mihi³⁷, Hohyun Keum³⁸, Moonsub Shim³⁹, Seok Kim¹, Hanhwi Jang⁴⁰, Yeon Sik Jung⁴⁰, Christian Rossner^{41

42

43

44}, Tobias A F König^{41

42

43

45}, Andreas Fery^{41

45

46}, Zhiwei Li^{28

47

48}, Koray Aydin^{47

49}, Chad A Mirkin^{28

47

49}, Junhwa Seong¹, Nara Jeon¹, Zhiyun Xu⁵⁰, Tian Gu⁵⁰, Juejun Hu⁵⁰, Hyounghan Kwon^{51

52}, Hojoong Jung⁵¹, Hossein Alijani^{53

54}, Igor Aharonovich^{53

54}, Joohoon Kim¹, Junsuk Rho^{1

6

55

56}

Affiliations

¹ Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.
² Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR), Singapore 138634, Singapore.
³ Department of Materials Science and Engineering, National University of Singapore, Singapore 117575, Singapore.
⁴ Singapore University of Technology and Design, Singapore 487372, Singapore.
⁵ Department of Physics, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Republic of Korea.
⁶ Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.
⁷ fourth Physics Institute and Research Center SCoPE, University of Stuttgart, Stuttgart 70569, Germany.
⁸ RIKEN Center for Advanced Photonics, Wako 351-0198, Japan.
⁹ Institute of Post-LED Photonics, Tokushima University, Tokushima 770-8501, Japan.
¹⁰ Department of Electrical and Computer Engineering, Grainger College of Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States.
¹¹ Chair in Hybrid Nanosystems, Nanoinstitute Munich, Ludwig-Maximilians-Universität, Munich 80539, Germany.
¹² School of Physics and Astronomy, Monash University, Clayton, VIC 3800, Australia.
¹³ Department of Physics, Imperial College London, London SW72AZ, United Kingdom.
¹⁴ Department of Creative Convergence Engineering, Hanbat National University, Daejeon, 34158, Republic of Korea.
¹⁵ Global Frontier Center for Multiscale Energy Systems, Seoul National University, Seoul 08826, Republic of Korea.
¹⁶ Department of Mechanical Engineering, Seoul National University, Seoul 08826, Republic of Korea.
¹⁷ Department of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea.
¹⁸ Department of Biophysics, Sungkyunkwan University, Suwon 16419, Republic of Korea.
¹⁹ Department of Intelligent Precision Healthcare Convergence, Sungkyunkwan University, Suwon 16419, Republic of Korea.
²⁰ NanoScience Technology Center, University of Central Florida, Florida 32826, United States.
²¹ Department of Physics, University of Central Florida, Florida 32816, United States.
²² The College of Optics and Photonics, University of Central Florida, Orlando, Florida 32816, United States.
²³ Second Physics Institute, University of Stuttgart Pfaffenwaldring 57, Stuttgart 70569, Germany.
²⁴ Max Planck Institute for Solid State Research, Heisenbergstrasse 1, Stuttgart D-70569, Germany.
²⁵ Faculty of Physics and Center for NanoScience (CeNS) Ludwig-Maxim8ilians-University, Munich 80539, Germany.
²⁶ Skolkovo Institute of Science and Technology, Moscow 121205, Russia.
²⁷ Department of Chemistry, Seoul National University, Seoul 08826, Republic of Korea.
²⁸ Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States.
²⁹ Department of Materials Science and Engineering, Seoul National University, Seoul 08826, Republic of Korea.
³⁰ Max Planck Institute for Medical Research, Heidelberg 69120, Germany.
³¹ Institute for Molecular Systems Engineering and Advanced Materials, Heidelberg University, Heidelberg 69120, Germany.
³² School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST), Gwangju, 61005, Republic of Korea.
³³ Center for Nanomedicine, Institute for Basic Science (IBS), Seoul 03722, Republic of Korea.
³⁴ Department of Nano Biomedical Engineering (NanoBME), Yonsei University, Seoul, 03722, Republic of Korea.
³⁵ Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea.
³⁶ Department of Biomedical Engineering, Yonsei University, Wonju 26493, Republic of Korea.
³⁷ Institute of Materials Science of Barcelona (ICMAB-CSIC), Bellaterra, 08193 Spain.
³⁸ Digital Health Care R&D Department, Korea Institute of Industrial Technology (KITECH), Cheonan 31056, Republic of Korea.
³⁹ Department of Materials Science and Engineering, University of Illinois, Urbana-Champaign, Illinois 61801, United States.
⁴⁰ Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea.
⁴¹ Leibniz-Institut für Polymerforschung Dresden e. V., Dresden 01069, Germany.
⁴² Faculty of Chemistry and Food Chemistry, Technische Universität Dresden, Dresden 01069, Germany.
⁴³ Dresden Center for Intelligent Materials (DCIM), Technische Universität Dresden, Dresden 01069, Germany.
⁴⁴ Department of Polymers, University of Chemistry and Technology Prague, Prague 6 166 28, Czech Republic.
⁴⁵ Center for Advancing Electronics Dresden (cfaed), Technische Universität Dresden, Dresden 01069, Germany.
⁴⁶ Physical Chemistry of Polymeric Materials, Technische Universität Dresden, Dresden 01069, Germany.
⁴⁷ International Institute for Nanotechnology, Northwestern University, Evanston, Illinois 60208, United States.
⁴⁸ Department of Chemistry and Biochemistry, University of Maryland, College Park, Mayland 20742, United States.
⁴⁹ Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois 60208, United States.
⁵⁰ Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States.
⁵¹ Center for Quantum Information, Korea Institute of Science and Technology (KIST), Seoul 02792, Republic of Korea.
⁵² Division of Quantum Information, KIST School, Korea University of Science and Technology, Seoul 02792, Republic of Korea.
⁵³ School of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, Australia.
⁵⁴ ARC Centre of Excellence for Transformative Meta-Optical Systems (TMOS), University of Technology Sydney, Ultimo, New South Wales 2007, Australia.
⁵⁵ Department of Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.
⁵⁶ POSCO-POSTECH-RIST Convergence Research Center for Flat Optics and Metaphotonics, Pohang 37673, Republic of Korea.

PMID: 40152322
DOI: 10.1021/acsnano.4c10964

Review

Nanofabrication for Nanophotonics

Younghwan Yang et al. ACS Nano. 2025.

. 2025 Apr 8;19(13):12491-12605.

doi: 10.1021/acsnano.4c10964. Epub 2025 Mar 28.

Authors

Affiliations

¹ Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.
² Institute of Materials Research and Engineering (IMRE), Agency for Science, Technology and Research (A*STAR), Singapore 138634, Singapore.
³ Department of Materials Science and Engineering, National University of Singapore, Singapore 117575, Singapore.
⁴ Singapore University of Technology and Design, Singapore 487372, Singapore.
⁵ Department of Physics, Ulsan National Institute of Science and Technology (UNIST), Ulsan 44919, Republic of Korea.
⁶ Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.
⁷ fourth Physics Institute and Research Center SCoPE, University of Stuttgart, Stuttgart 70569, Germany.
⁸ RIKEN Center for Advanced Photonics, Wako 351-0198, Japan.
⁹ Institute of Post-LED Photonics, Tokushima University, Tokushima 770-8501, Japan.
¹⁰ Department of Electrical and Computer Engineering, Grainger College of Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801, United States.
¹¹ Chair in Hybrid Nanosystems, Nanoinstitute Munich, Ludwig-Maximilians-Universität, Munich 80539, Germany.
¹² School of Physics and Astronomy, Monash University, Clayton, VIC 3800, Australia.
¹³ Department of Physics, Imperial College London, London SW72AZ, United Kingdom.
¹⁴ Department of Creative Convergence Engineering, Hanbat National University, Daejeon, 34158, Republic of Korea.
¹⁵ Global Frontier Center for Multiscale Energy Systems, Seoul National University, Seoul 08826, Republic of Korea.
¹⁶ Department of Mechanical Engineering, Seoul National University, Seoul 08826, Republic of Korea.
¹⁷ Department of Materials Science and Engineering, Korea University, Seoul 02841, Republic of Korea.
¹⁸ Department of Biophysics, Sungkyunkwan University, Suwon 16419, Republic of Korea.
¹⁹ Department of Intelligent Precision Healthcare Convergence, Sungkyunkwan University, Suwon 16419, Republic of Korea.
²⁰ NanoScience Technology Center, University of Central Florida, Florida 32826, United States.
²¹ Department of Physics, University of Central Florida, Florida 32816, United States.
²² The College of Optics and Photonics, University of Central Florida, Orlando, Florida 32816, United States.
²³ Second Physics Institute, University of Stuttgart Pfaffenwaldring 57, Stuttgart 70569, Germany.
²⁴ Max Planck Institute for Solid State Research, Heisenbergstrasse 1, Stuttgart D-70569, Germany.
²⁵ Faculty of Physics and Center for NanoScience (CeNS) Ludwig-Maxim8ilians-University, Munich 80539, Germany.
²⁶ Skolkovo Institute of Science and Technology, Moscow 121205, Russia.
²⁷ Department of Chemistry, Seoul National University, Seoul 08826, Republic of Korea.
²⁸ Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States.
²⁹ Department of Materials Science and Engineering, Seoul National University, Seoul 08826, Republic of Korea.
³⁰ Max Planck Institute for Medical Research, Heidelberg 69120, Germany.
³¹ Institute for Molecular Systems Engineering and Advanced Materials, Heidelberg University, Heidelberg 69120, Germany.
³² School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST), Gwangju, 61005, Republic of Korea.
³³ Center for Nanomedicine, Institute for Basic Science (IBS), Seoul 03722, Republic of Korea.
³⁴ Department of Nano Biomedical Engineering (NanoBME), Yonsei University, Seoul, 03722, Republic of Korea.
³⁵ Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea.
³⁶ Department of Biomedical Engineering, Yonsei University, Wonju 26493, Republic of Korea.
³⁷ Institute of Materials Science of Barcelona (ICMAB-CSIC), Bellaterra, 08193 Spain.
³⁸ Digital Health Care R&D Department, Korea Institute of Industrial Technology (KITECH), Cheonan 31056, Republic of Korea.
³⁹ Department of Materials Science and Engineering, University of Illinois, Urbana-Champaign, Illinois 61801, United States.
⁴⁰ Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea.
⁴¹ Leibniz-Institut für Polymerforschung Dresden e. V., Dresden 01069, Germany.
⁴² Faculty of Chemistry and Food Chemistry, Technische Universität Dresden, Dresden 01069, Germany.
⁴³ Dresden Center for Intelligent Materials (DCIM), Technische Universität Dresden, Dresden 01069, Germany.
⁴⁴ Department of Polymers, University of Chemistry and Technology Prague, Prague 6 166 28, Czech Republic.
⁴⁵ Center for Advancing Electronics Dresden (cfaed), Technische Universität Dresden, Dresden 01069, Germany.
⁴⁶ Physical Chemistry of Polymeric Materials, Technische Universität Dresden, Dresden 01069, Germany.
⁴⁷ International Institute for Nanotechnology, Northwestern University, Evanston, Illinois 60208, United States.
⁴⁸ Department of Chemistry and Biochemistry, University of Maryland, College Park, Mayland 20742, United States.
⁴⁹ Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois 60208, United States.
⁵⁰ Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States.
⁵¹ Center for Quantum Information, Korea Institute of Science and Technology (KIST), Seoul 02792, Republic of Korea.
⁵² Division of Quantum Information, KIST School, Korea University of Science and Technology, Seoul 02792, Republic of Korea.
⁵³ School of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, Ultimo, New South Wales 2007, Australia.
⁵⁴ ARC Centre of Excellence for Transformative Meta-Optical Systems (TMOS), University of Technology Sydney, Ultimo, New South Wales 2007, Australia.
⁵⁵ Department of Electrical Engineering, Pohang University of Science and Technology (POSTECH), Pohang 37673, Republic of Korea.
⁵⁶ POSCO-POSTECH-RIST Convergence Research Center for Flat Optics and Metaphotonics, Pohang 37673, Republic of Korea.

PMID: 40152322
DOI: 10.1021/acsnano.4c10964

Abstract

Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences. Here, this mega-review comprehensively explores various facets of nanofabrication focusing on its application in nanophotonics. It delves into high-resolution techniques like focused ion beam and electron beam lithography, methods for 3D complex structure fabrication, scalable manufacturing approaches, and material compatibility considerations. Special attention is given to emerging trends such as the utilization of two-photon lithography for 3D structures and advanced materials like phase change substances and 2D materials with excitonic properties. By highlighting these advancements, the review aims to provide insights into the ongoing evolution of nanofabrication, encouraging further research and application in creating functional nanostructures. This work encapsulates critical developments and future perspectives, offering a detailed narrative on the state-of-the-art in nanofabrication tailored for both new researchers and seasoned experts in the field.

Keywords: Additive manufacturing; Bottom-up fabrication; High-resolution lithography; Metamaterials; Metaphotonics; Metasurfaces; Nanofabrication; Nanomanufacturing; Scalable manufacturing; Top-down fabrication.

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Nanofabrication for Nanophotonics

Affiliations

Nanofabrication for Nanophotonics

Authors

Affiliations

Abstract

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