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. 2025 May 21;11(1):98.
doi: 10.1038/s41378-025-00937-z.

A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator

Jiaxin Qin  1   2 , Wenliang Xia  1   2 , Junbo Wang  3   4 , Deyong Chen  1   2 , Yulan Lu  1 , Xiaoye Huo  1   2 , Bo Xie  5   6 , Jian Chen  1   2
Affiliations

A novel high-performance wide-range vacuum sensor based on a weak-coupling resonator

Jiaxin Qin et al. Microsyst Nanoeng. .

Abstract

Wide-range vacuum sensors (0.1-105 Pa) are crucial for a variety of applications, particularly in semiconductor equipment. However, existing sensors often face a trade-off between measurement range and accuracy, with some offering a wide range at the expense of low accuracy, and others providing high accuracy within a limited range. This restricts their applicability in advanced technologies. The primary challenge lies in the sensitivity constraints at medium vacuum, the accuracy limitations at low vacuum, and the dependence of gas types. In this study, a new paradigm of high-performance wide-range MEMS diaphragm-based vacuum sensor is proposed, which is inherently small volume and independent of gas types. The sensor measures the vacuum pressure based on a two degree of freedom weak-coupling resonator, which operates in two distinct modes. In the range from 0.3 Pa to 103 Pa, it works in mode-localized mode, where amplitude ratio serves as the output to enhance sensitivity and resolution. For pressure ranging from 103 Pa to 105 Pa, it works in traditional resonance mode, with frequency serving as the output to achieve high accuracy. Experimental results demonstrate that the proposed sensor outperforms conventional vacuum sensors.

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Conflict of interest statement

Conflict of interest: Jiaxin Qin, Wenliang Xia, Junbo Wang, Deyong Chen, Yulan Lu, Xiaoye Huo, Bo Xie, and Jian Chen declare that they have no conflict of interest or financial conflicts to disclose.

Figures

Fig. 1
Fig. 1. Schematic of mode localization and two working modes.
a The mass-spring-damper model of the two-DoF coupling resonator. b Frequency response of weak-coupling resonator (in mode-localized mode). c Frequency response of two primary resonators without coupling (in traditional resonance mode). d Workflow of the dual-mode sensor
Fig. 2
Fig. 2. Structure of the proposed weak-coupling resonator and sensor.
a Structure of the proposed weak-coupling resonator. b Schematic of diaphragm deformation and stress under the loaded pressure. c Structure of the sensor chip. d Infrared microscope image of the fabricated sensor from diaphragm side. e The picture of the fabricated sensor chip
Fig. 3
Fig. 3. Schematic of the closed-loop control method for the two working modes.
a The open-loop characteristics of the WCR at the initial operating point (mode-localized mode). b Schematic of closed-loop control in mode-localized mode. c Schematic of closed-loop control in traditional resonance mode
Fig. 4
Fig. 4. Performance of the sensor in mode-localized mode.
a Sensitivity of the AR output from −20 °C to 120 °C. b The calibration error including hysteresis and repeatability at 120 °C. c Measurement results of resolution around 5.00 Pa. d The monitoring results of time drift within 91 h
Fig. 5
Fig. 5. Performance of the sensor in traditional resonance mode.
a Characteristics of the frequency output of Resonator1 and Resonator2. b The measurement error of the sensor after temperature compensation
Fig. 6
Fig. 6. The characteristics of resolution and time drift in traditional resonance mode.
a, b The testing results of resolutions of Resonator1 and Resonator2. c, d The monitoring results of time drift of Resonator1 and Resonator2
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