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. 2025 Feb 14;14(11):1809-1815.
doi: 10.1515/nanoph-2024-0682. eCollection 2025 Jun.

Sub-MHz homogeneous linewidth in epitaxial Y2O3: Eu3+ thin film on silicon

Affiliations

Sub-MHz homogeneous linewidth in epitaxial Y2O3: Eu3+ thin film on silicon

Diana Serrano et al. Nanophotonics. .

Abstract

Thin films provide nanoscale confinement together with compatibility with photonic and microwave architectures, making them ideal candidates for chip-scale quantum devices. In this work, we propose a thin film fabrication approach yielding the epitaxial growth of Eu3+ doped Y2O3 on silicon. We combine two of the most prominent thin film deposition techniques: chemical vapor deposition (CVD) and molecular beam epitaxy (MBE). We report sub-megahertz optical homogeneous linewidths up to 8 K for the Eu3+ dopants in the film, and lowest value of 270 kHz. This result constitutes a ten-fold improvement with respect to previous reports on the same material, opening promising perspectives for the development of scalable and compact quantum devices containing rare-earth ions.

Keywords: homogeneous linewidth; quantum technologies; rare-earth; thin film.

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Conflict of interest statement

Conflict of interest: Authors state no conflict of interest.

Figures

Figure 1:
Figure 1:
Epitaxial Y2O3: Eu3+ thin film on Gd2O3/Si substrate. (a) Schematic view of the multilayer structure. (b) Y2O3: Eu3+ film surface morphology observed by scanning electron microscopy (SEM).
Figure 2:
Figure 2:
High-resolution X-ray diffraction (XRD) investigations. (a) θ/2θ scan showing [111] out-of-plane orientation for the Y2O3:Eu3+ film. (b) Omega scan around one of the (222) diffraction peaks yielding a mosaicity of 0.6°. (c, d) Pole figures showing in-plane orientation corresponding to that of the substrate, further confirming epitaxial growth. The arrows indicate the position of the diffraction spots in the reciprocal space.
Figure 3:
Figure 3:
Photoluminescence (PL) spectroscopy of Eu3+ ions in the Y2O3 thin film. (a) Room temperature PL spectrum showing several Eu3+ emission lines including the strong 5D07F2 emission at 611 nm. (b) 5D07F2 PL decay recorded at 50 mK and 611 nm under resonant 7F05D0 excitation at 580.79 nm. The dashed orange line corresponds to a single exponential fit to the data yielding a population lifetime T 1 = 0.95 ms for the 5D0 excited state.
Figure 4:
Figure 4:
High resolution and coherent optical characterizations at mK temperature. (a) Inhomogeneous linewidth for the 5D07F0 transition measured at three different excitation powers by scanning the excitation wavelength while monitoring the 5D07F2 emission at 611 nm. A Gaussian curve fit to the data yields a full width at half maximum (FWHM) of 132 ± 5 GHz. The stars indicate spectral position within the linewidth of the ions probed in (c). (b) Spectral hole burned at 580.787 nm at a temperature of 800 mK (blue solid line). The dashed orange line correspond to a Lorentzian curve fit to the data yielding a hole width of 1.3 ± 0.4 MHz. (c) Homogeneous linewidth (left axis) and hole width (right axis) as a function of burn power measured at three different frequencies within the inhomogeneous line (see (a)). (d) Homogeneous linewidth as a function temperature (blue points). The dashed orange line corresponds to a fit to these data using eq. (1).

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