Nuclear reaction transmutation doping in GaN-HEMT MOSFETs
- PMID: 40516337
- DOI: 10.1016/j.apradiso.2025.111939
Nuclear reaction transmutation doping in GaN-HEMT MOSFETs
Abstract
Alpha-induced doping of GaN-High Electron Mobility Transistor (HEMT) was performed employing 45 MeV-α beam. The population of n-type and p-type dopants was identified and quantified by analysing the induced activities of the contributing nuclear reactions. The population was reproduced theoretically, using TALYS -1.96 nuclear reaction model, and the population of non-radioactive dopants was also estimated using the same model. The analysis shows a significant population of Ge and As isotopes, leading to intense n-type doping in the GaN-HEMT semiconductor.
Keywords: Cross-section; GaN; Integral yield; Radiation induced effects; TALYS-1.96 code.
Copyright © 2025 Elsevier Ltd. All rights reserved.
Conflict of interest statement
Declaration of competing interest The authors declare that they have no known competing financial interests or personal relationships that could have appeared to influence the work reported in this paper.
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