Nanoscale x-ray imaging of circuit features without wafer etching.
Deng J, Hong YP, Chen S, Nashed YSG, Peterka T, Levi AJF, Damoulakis J, Saha S, Eiles T, Jacobsen C.
Deng J, et al. Among authors: nashed ysg.
Phys Rev B. 2017 Mar 1;95(10):104111. doi: 10.1103/PhysRevB.95.104111. Epub 2017 Mar 24.
Phys Rev B. 2017.
PMID: 28752135
Free PMC article.